| 摘要 |
<p>The invention concerns a process for producing pressure sensor elements which have a metallic membrane with a thin resistant coating. A blind hole is set into a body and the resistive thin coating is applied to the body on the side opposite the blind hole. According to the present invention, a plurality of pressure sensor elements (10) are produced in a panel (28), the panel is separated into individual pressure sensor elements (10).</p> |
