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发明名称
FORMATION OF DEPOSITED FILM AND APPARATUS THEREFOR
摘要
申请公布号
JPH1060656(A)
申请公布日期
1998.03.03
申请号
JP19960241374
申请日期
1996.08.23
申请人
CANON INC
发明人
AOIKE TATSUYUKI
分类号
G03G5/08;C23C16/44;C23C16/50;C23C16/505;H01L21/205;(IPC1-7):C23C16/50
主分类号
G03G5/08
代理机构
代理人
主权项
地址
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