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发明名称
Micromechanical relay
摘要
申请公布号
EP0710972(B1)
申请公布日期
1998.02.25
申请号
EP19950115649
申请日期
1995.10.04
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
SCHLAAK, HELMUT, DR.;SCHIMKAT, JOACHIM
分类号
H01L21/302;H01H59/00;H01L21/3065;(IPC1-7):H01H59/00
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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