发明名称 Wire bonding apparatus
摘要 In a wire bonding apparatus used in manufacturing, for instance, semiconductor devices, a cover is attached to a detection image intake section of the camera mirror tube of a camera which detects the bonding points of a semiconductor workpiece, and the cover covers an area where a variation in air density occurs between the detection image intake section of the camera mirror tube and the semiconductor workpiece.
申请公布号 US5720424(A) 申请公布日期 1998.02.24
申请号 US19960657016 申请日期 1996.05.30
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 TAKEUCHI, TAKASHI
分类号 H01L21/60;B23K20/00;H01L21/603;(IPC1-7):H01L21/603 主分类号 H01L21/60
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