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发明名称
SCAN PROBE MICROSCOPE
摘要
申请公布号
JPH1054833(A)
申请公布日期
1998.02.24
申请号
JP19970105806
申请日期
1997.04.23
申请人
OLYMPUS OPTICAL CO LTD
发明人
SATO CHIAKI;KOSHIISHI KIYOZO;SHIGETOMI SADAO;MISHIMA SHUZO;TAKASE TSUGIKO
分类号
G01B7/34;G01B7/00;G01B11/30;G01B21/30;G01N37/00;G01Q10/04;G01Q30/02;G01Q60/10;G01Q90/00;G02B21/00;(IPC1-7):G01N37/00
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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