| 摘要 |
<p>PROBLEM TO BE SOLVED: To quickly suck and remove a work dust by sucking and removing the work dust from the machining position and vibrating the sucking pressure. SOLUTION: An object 5 being machined is irradiated with a laser beam emitted from a laser beam source 1 via a beam forming part 2, beam relay part 3 and objective lens 4. The chemical bond of the object 5 being machined is cut by an ablation reaction brought about with the laser beam. The pressure of a groove 7 is vibrated with a pressure vibrating device 8, and the work dust 10 is quickly separated from the object 5 being machined receiving the vibration and sucked via the groove 7. The inner part of the groove 7 is made to be negative pressure with a vacuum pump 9. By this way, a lidded phenomenon in the position wherein the ablation reaction is late can be eliminated and the laser machining of high quality is executed.</p> |
