| 摘要 |
<p>PROBLEM TO BE SOLVED: To eliminate the influence of a reaction produce when an original plate or substrate is accelerated, while the plate of substrate is moved in the scanning direction on the exposing ability of an exposing device without lowering the throughput of the device. SOLUTION: In a stage device provided with a fixed section 4a, a mobile section 4b, a driving means 4 which moves the mobile section 4b in a prescribed moving direction by imparting a thrust between the sections 4a and 4b, a first supporting means 101 which supports the fixed section 4a with a degree of freedom in the moving direction, a uniaxial supporting means 102 which supports the fixed section 4a rigidly in the moving direction and flexibly in the other directions, and a second supporting means 105 which is isolated from the first supporting means 101, so that the vibration of the means 101 cannot be transmitted to the means 105 are provided. The stage device is used for scanning the original plate of a scanning exposing device and the first supporting means 101 is coupled with a lens barrel surface plate 9 mounted with a projection optical system 2.</p> |
