| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a wafer from being damaged even when false set is to be made by eliminating an opening part of a carrier by fixing a means for preventing a stopping part of a handle from entering to an opening part of a wall surface parallel to a wafer of a carrier as a window for cleaning. SOLUTION: A protection member 2-9 which is set in an opening part above a wall surface parallel to a wafer of a usual carrier 2 and prevents a stopping part of a handle from entering is fixed. A guide 2-9-1 to be fitted to a stopping part of a handle is provided in a side surface of the protection member 2-9. Otherwise, a protection member 2-10 with a number of window holes which is another form of operation of the plate-like protection member 2-9 is provided. An inside of a frame 2-10-1 along an outline of an opening part above the carrier 2 is provided with a number of net-like or lattice-like window holes 2-10-2 which improves flow of treatment liquid. Thereby, it prevents a part of a handle from entering inside from an opening part of the carrier 2 when false set is made.</p> |
