| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce variation in characteristics from element to element by providing a plurality of substantially parallel grooves in a base plate portion and others between electrodes. SOLUTION: Grooves 6 are provided in the direction substantially parallel to opposing surfaces of element electrodes 2 and 3 of an element. As the grooves 6 are formed in an electrically conductive film 4 portion, the film thickness varies periodically. As a result, resistance also varies periodically, and linear cracks may be formed parallel to opposing surfaces of the electrodes 2 and 3 along the groove part having the highest resistance by applying energized forming processing. While it is difficult to form in accurate parallel straight lines in electrodes, cracks may be reliably formed providing a large number of linear grooves 6. That is to say, the cracks may be controlled to be formed along a definite direction and variation in element characteristics may be restricted.</p> |
