APPARATUS AND METHOD FOR FORMING THIN FILM,申请号JP19960203650-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR FORMING THIN FILM
摘要
申请公布号	JPH1050687(A)	申请公布日期	1998.02.20
申请号	JP19960203650	申请日期	1996.08.01
申请人	TOSHIBA CORP	发明人	ISHIDA ARICHIKA;OZEKI SHIGEKI
分类号	H01L21/31;H01L21/316;(IPC1-7):H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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