| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a method and an apparatus, for a surface analysis, in which the scale of the apparatus is not large, in which an operation is simple, the time for the analysis is short and a sample is not damaged by the analysis. SOLUTION: In this apparatus, a beam of visible light or vacuum ultraviolet rays which are radiated from a light source 1 are spectrally diffracted by a spectroscope 3 so as to irradiate a very small region 8' on the face of a sample 9, electrons which are emitted by the irradiation are detected by a detector 13, a detection signal is analyzed by a computer 14 so as to be compared with, and referred to, a peak wavelength 22, a peak intensity 21 or a threshold value 23, and information about the element or the chemical state of the sample 9 and an adsorbed substance and about its change with the passage of time is obtained. In addition, incident light 8 is scanned on the face of the sample 9, and information about the two-dimensional distribution of the element of the sample 9 is obtained.</p> |
