| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously analyze a two-dimensional structure parallel to a sample face of atomic structure or the like, and change information of the structure in a depthwise direction in a short time, by inputting X rays within a specific range of angles to the sample face and detecting diffracted X rays by a two-dimensional detector. SOLUTION: A sample 11 is set on a holder 1 so that a surface of the sample 11 is perpendicular to a rotary shaft of an angle control part 2. The angle control part 2 rotates the holder 1 around a z-axis, and an angle control part 3 sets a two-dimensional detector 5 at an optional position in the circumference of the rotary shaft of the angle control part 2. An angle control part 4 rotates the whole of the holder 1 and angle control parts 2, 3 to entering X rays thereby controlling an angle of incidence of X rays to the sample 11. X rays are projected when the angleαof incidence to the face of the sample 11 from an X-ray source 12 is limited to be 0 deg.<α<5 deg.. While a diffraction angle 2θof the detector 5 is changed by the control part 3, an intensity of diffracted rays is measured. In this manner, both a periodicity in two-dimensional directions and information in a depthwise direction in the face of the sample and be measured at the same time.
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