| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning optical microscope whose irregularity of illumination to a sample is reduced and a good image is obtained. SOLUTION: In a microscope irradiating a sample 10 with a beam through an objective lens 9, while scanning a laser beam from a laser beam source 1 by a scanning mirror 4 and detecting the observing image of the sample 10, a pupil projection lens 6 for projecting the scanning mirror 4 on the rear focal position (pupil) of the objective lens 9 and a pupil projecting optical system 5 having an image forming lens 7 are arranged between the scanning mirror 4 and the objective lens 9 and a mirror 8 having the same reflectivity characteristic to an incident angle as the scanning mirror 4 is arranged between the image forming lens 7 and the objective lens 9. By representing the rear focal distance of the pupil projection lens 6 by (f), the focal distance of the image forming lens 7 by 2f, the incident angle 6 on the scanning mirror 4 by a reference incident angle a and makingθ=α-βto the scanning angleβof the relevant scanning mirror 4, an incident angleθ' is made to beθ'≈α+β.
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