| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a simple fuse cut method by means of laser light. SOLUTION: The chemical connection of the material of a fuse element 13 is non-thermally cut and the fuse element 13 is cut by the excimer laser light 15 of ArF excimer laser light (wavelength = 193nm and photon energy = 148kcal/mol) having photon energy larger than the material Al (connection energy = 78.7kcal/mol) of the fuse element 13 or CU (connection energy = 80.5kcal/mol) and smaller than a base SiO2 film (Si-O connection energy = 191kcal/mol) 12, KrF excimer laser light (wavelength = 248nm and photon energy = 115kcal/mol) and XeCl excimer laser light (wavelength = 308nm and photon energy = 93kcal/mol).</p> |
