| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate for display elements having an excellent adhe sion property between transparent conductive films and inorg. insulating films and org. insulating films and having high reliability. SOLUTION: The substrate for the display elements is formed by successively laminating gate electrodes 12, gate insulating films 13, semiconductor layers 14, channel protective layers 15, n<+> Si layers constituting source electrodes 16a and drain electrodes 16b transparent conductive films 17, 17', metallic layers 18, 18', interlayer insulating films 19 and pixel electrodes l on an insulative substrate 11. At this time, a photosensitive resin blended with a silane compd. is used for the interlayer insulating films 19. As a result, the substrate for the display elements having the excellent adhesion property between the interlayer insulating films 19 and the transparent conductive films in contact with the interlayer insulating films 19 and the inorg. insulating films is obtd.</p> |
