发明名称 |
ADHESION INCREASING TREATMENT AND ITS DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To reduce a consumption of an adhesion increasing agent in adhesion increasing treatment by which a surface of a substrate is coated with the adhesion increasing agent. SOLUTION: Vapor 2 of an adhesion increasing agent is blown on a surface of a substrate 5 by means of a nozzle body 1 with nozzle holes 6 almost uniform in size in the transverse direction and the vapor 2 diffused after impinging on the surface of the substrate 5 is exhausted through a suction hole 3 disposed around the nozzle body 1. Since the vapor 2 is exhausted near the diffusion part, a region 7 ensuring the coating weight required to increase adhesion, that is, the required concn. of vapor is reduced and adhesion increasing treatment with small consumption is carried out. |
申请公布号 |
JPH1048842(A) |
申请公布日期 |
1998.02.20 |
申请号 |
JP19960202090 |
申请日期 |
1996.07.31 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
OGASAWARA KAZUHISA;IMADA TETSUO;MINO YOSHIMITSU |
分类号 |
G03F7/38;H01L21/027;(IPC1-7):G03F7/38 |
主分类号 |
G03F7/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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