发明名称 ADHESION INCREASING TREATMENT AND ITS DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce a consumption of an adhesion increasing agent in adhesion increasing treatment by which a surface of a substrate is coated with the adhesion increasing agent. SOLUTION: Vapor 2 of an adhesion increasing agent is blown on a surface of a substrate 5 by means of a nozzle body 1 with nozzle holes 6 almost uniform in size in the transverse direction and the vapor 2 diffused after impinging on the surface of the substrate 5 is exhausted through a suction hole 3 disposed around the nozzle body 1. Since the vapor 2 is exhausted near the diffusion part, a region 7 ensuring the coating weight required to increase adhesion, that is, the required concn. of vapor is reduced and adhesion increasing treatment with small consumption is carried out.
申请公布号 JPH1048842(A) 申请公布日期 1998.02.20
申请号 JP19960202090 申请日期 1996.07.31
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 OGASAWARA KAZUHISA;IMADA TETSUO;MINO YOSHIMITSU
分类号 G03F7/38;H01L21/027;(IPC1-7):G03F7/38 主分类号 G03F7/38
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