Process for improved quality of cvd copper films,申请号SG19950001354-传众专利搜索

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发明名称	Process for improved quality of cvd copper films
摘要
申请公布号	SG46145(A1)	申请公布日期	1998.02.20
申请号	SG19950001354	申请日期	1994.05.11
申请人	AIR PRODUCTS AND CHEMICALS, INC.	发明人	NORMAN JOHN ANTHONY THOMAS;HOCHBERG ARTHUR KENNETH;ROBERTS DAVID ALLEN
分类号	C23C16/14;C23C16/18;H01L21/28;(IPC1-7):C23C16/18;H01L21/285;C07F1/08	主分类号	C23C16/14
代理机构		代理人
主权项
地址

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