摘要 |
PROBLEM TO BE SOLVED: To set as long as possible a length of a buffer channel for damping a low frequency vibration by providing a barrier membrane with a partition, and attaching at least one notch part in the channel partition for liquid connection of a partial channel. SOLUTION: A buffer channel 5 is formed of two partial passages 6 and 7, has a form of a ring-like groove, and is opened in a direction of being located opposite to each other. An area of an end 14 of the partial passages 6 and 7 is pressed against the channel partition 9 under an axial preload to be shielded. For fluid connection of the operation chamber and a pressure adjustment chamber 3, a first partial passage 6 has an outlet 26 which is connected to an inlet 25, a passage partition 9 has an outlet 26 which is connected to a notch part 10, and a second passage 7 has an outlet 26 which is connected to the pressure adjustment chamber 3. At the time of the transmission of the low frequency vibration, the barrier membrane 8 generates a soft resistance with thick parts 20 and 21 while an axial direction free channel of an outside boundary of the barrier membrane 8 is located inside of a nozzle case, and the membrane 8 is cured in a small movement amount and to a slight degree which can be ignored so that an insulation of a high frequency vibration is excellent. |