发明名称
摘要 The object of the invention is to provide a polishing machine, which are capable of making the degree of plane higher. The polishing machine comprises: a polishing plate for polishing a work, which is pressed thereon, the polishing plate being capable of rotating; and a driving mechanism for rotating the polishing plate, characterized in that the driving mechanism is capable of rotating the polishing plate in one direction and the other direction. In the polishing machine, since the work is polished by rotating the polishing plate in the one direction, then rotating it in the other direction, slury concentrated at a specific position of the work can be scattered, so that the work can be polished uniformly and the degree of plane can be higher.
申请公布号 JP2716653(B2) 申请公布日期 1998.02.18
申请号 JP19930273595 申请日期 1993.11.01
申请人 发明人
分类号 B24B37/04;B24B37/10;H01L21/304 主分类号 B24B37/04
代理机构 代理人
主权项
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