| 摘要 |
A seismic mass 41 is supported by a beam 37 which has opposite ends secured to a housing 11 so that its gravity center G is positioned away from a straight line connecting the opposite ends the beam 37. Thus, a rotating force is given to the seismic mass 41 in response to an acceleration. The rotating force given to the seismic mass 41 causes displacement of the beam 37. Then, a capacitance between a movable electrode 43, 45 and a fixed electrode 21, 23, 25, 31, 33, 35 changes, and such a change defines a magnitude of the acceleration.
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