摘要 |
A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions. |
申请人 |
HONDA GIKEN KOGYO KABUSHIKI KAISHA |
发明人 |
HOSOI, TAKASHI;HIYAMA, SATOSHI;SHINOTUKA, SUKEYUJU;DOI, MIZUHO;YAMAKAWA, HIROSHI;KURIYAMA, NARIAKI;NISHIO, TOMOYUKI;INABA, ATSUSHI;FUEKI, NOBUHIRO |