发明名称 |
Cathode arc source and graphite target |
摘要 |
A target is made by pressing graphite powder of average particle size greater than 2 microns at elevated temperature and pressure in the absence of binding material. The target contributes to reduced macroparticles in films deposited with filtered cathode arc sources. |
申请公布号 |
AU3630397(A) |
申请公布日期 |
1998.02.10 |
申请号 |
AU19970036303 |
申请日期 |
1997.07.24 |
申请人 |
NANYANG TECHNOLOGICAL UNIVERSITY |
发明人 |
XU SHI;BENG KANG TAY;HONG SIANG TAN;DAVID IAN FLYNN |
分类号 |
C23C14/35;C23C14/06;C23C14/32;C23C14/34;H01J27/14;H01J37/32;H01J37/34 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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