| 摘要 |
PROBLEM TO BE SOLVED: To obtain an apparatus for preventing the heat value of an incinerator from being changed to make decomposition unstable when recovered fluorocarbon is pyrolyzed by using the incinerator. SOLUTION: A decomposition chamber in which recovered gas is allowed to flow is provided in the combustion chamber 12 of a combustion furnace and connected not only to the raw material tank 35 provided to the combustion furnace through a weighing valve 39 but also to an expansion tank 45 through an expansion valve 46 and the sensor means detecting the physical properties of the gas in the decomposition chamber and this sensor means and the weighing valve are connected through an operation means and the weighing valve 39 or the expansion valve 46 is controlled corresponding to the state in the decomposition chamber and the state of recovered fluorocarbon. |
