| 摘要 |
An electrostatic precipitator is provided within the housing (14) of a gas discharge laser (10), such as an exciter laser, to collect and trap dust particles generated in the course of laser operation. The precipitator comprises a plurality of spaced collector plates (12) mounted within the laser housing (14) for flow-through passage (38) of a lasing gas circulated by a fan (22) through a laser discharge zone (20) disposed between a pair of main electrodes (16, 18). The collector plates (12) are appropriately charged to define one precipitator pole, the opposite pole being defined by the laser discharge zone (20) and the ionization and fluorescent discharge associated therewith during laser operation. The collector plates (12) are shaped and spaced for changing the lasing gas flow direction and for reducing the flow velocity as the lasing gas circulates between the plates (12), to achieve enhanced electrostatic collection of dust. The collection plates (12) additionally include capture troughs (50, 52) for capturing duct particles that are attracted to the plate surfaces but otherwise not retained by electrostatic forces.
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