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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH1032192(A)
申请公布日期
1998.02.03
申请号
JP19970084337
申请日期
1997.03.17
申请人
TOKYO ELECTRON LTD
发明人
YONEYAMA SHIMAO
分类号
H05H1/46;C23F4/00;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
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