| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve a heated-type substrate support plate, which is used in a treating chamber, specially to make the heat characteristics of the plate enhance. SOLUTION: This substrate support plate has a groove for accepting a heating element 56. The element 56 is constituted of an outer covering 200, a heater coil 202 and a heat conduction filling material 204. This element 56 is formed into such a structure that after the element 56 is arranged in the groove, it is shrinked and the material 204 is turned into a compacted material on the periphery of the coil 202.</p> |
