X-RAY MASK STRUCTURE, MANUFACTURING METHOD, X-RAY X-RAY MASK STRUCTURE, MANUFACTURING METHOD, X-RAY EXPOSURE METHOD USING SAME, AND DEVICE MANUFACTUREEXPOSURE METHOD USING SAME, AND DEVICE MANUFACTURED BY USING SAME D BY USING SAME

摘要

An X-ray mask structure has an X-ray absorber, an X-ray permeable film and a frame for supporting the X-ray permeable film, wherein the X-ray absorber is made of gold having crystal orientation such that with respect to the peak strength 1 of the (200) surface, the peak strength of the (111) surface is less than 0.5 in an X-ray diffraction test. A method of manufacturing X-ray mask structures includes the step of forming the X-ray absorber, in which after an X-ray absorbing film is formed on the X-ray permeable film, heating and cooling operations are repeated a plurality of times.