发明名称 RF plasma power supply combining technique for increased stability
摘要 An RF power amplifier including a splitter, two branch circuits, and a combiner. The splitter has an input line receiving an RF signal, a first output line carrying a first output signal derived from the RF signal, and a second output line carrying a second output signal derived from the RF signal. A first branch circuit receives the first output signal and generates therefrom a first derived signal. A second branch circuit receives the second output signal and generates therefrom a second derived signal therefrom. The first branch circuit includes a first power amplifier and a phase shifting element. The second branch circuit includes a second power amplifier. The combiner, which has a first input receiving the first derived signal and a second input receiving the second derived signal, combines the first and second derived signals to produce a power output signal therefrom. The phase shifting element is connected between the output line of the first power amplifier and the first input of the combiner and produces a phase shift in a signal passing from the first power amplifier to the combiner relative to a signal passing from the second power amplifier to the combiner.
申请公布号 US5712592(A) 申请公布日期 1998.01.27
申请号 US19950398426 申请日期 1995.03.06
申请人 APPLIED MATERIALS, INC. 发明人 STIMSON, BRADLEY O.;RUMMEL, PAUL W.
分类号 H05H1/46;H03H11/30;H03H11/36;(IPC1-7):H03F3/68 主分类号 H05H1/46
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