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发明名称
THIN FILM FORMING DEVICE AND METHOD
摘要
申请公布号
JPH1027760(A)
申请公布日期
1998.01.27
申请号
JP19960182506
申请日期
1996.07.11
申请人
SEIKO EPSON CORP
发明人
MIYASAKA MITSUTOSHI
分类号
H01L21/205;H01L21/203;H01L21/336;H01L29/786;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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