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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1026658(A)
申请公布日期
1998.01.27
申请号
JP19960182524
申请日期
1996.07.11
申请人
SEIKO EPSON CORP
发明人
MATSUDA HIROMITSU
分类号
G01R31/28;G01R31/3185;H01L21/822;H01L27/04;(IPC1-7):G01R31/318
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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