发明名称
摘要 PURPOSE:To provide a photosensitive compsn. having high sensitivity and excellent resolving power. CONSTITUTION:This photosensitive compsn. is a positive type photosensitive compsn. contg. a compd. having 1,2-naphthoquinone-2-diazido-4- and/or -5-oxime sulfonate groups represented by the formula, wherein D is 1,2-naphthoquinone-2- diazido-4-yl or 1,2-naphthoquinone-2-diazido-5-yl, each of R<1> and R<2> is H, etc., R<3> may be alkyl group having substitute, R<4> and R<5> may be identical or not, each of A<1>-A<3> is a single bond, alkylene which may have a substituent or arylene and R<1> and R<2> or R<1>, R<2> and one or more among A<1>-A<3> may bond to each other to form a ring.
申请公布号 JP2704319(B2) 申请公布日期 1998.01.26
申请号 JP19910009928 申请日期 1991.01.30
申请人 发明人
分类号 G03F3/10;G03F7/022;G03F7/023;G03F7/039;H01L21/027;H01L21/30;(IPC1-7):G03F7/022 主分类号 G03F3/10
代理机构 代理人
主权项
地址