| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the time of collet touch and prevent a die from being damaged at the time of bonding. SOLUTION: A reference table 11 having a hole 10 is arranged in a moving domain of a collet 2. The hole 10 is connected with a gas supply source 13 through a pipe 12 and acts as a gas blowing hole. A collet 2 which sucks and holds a die 18 is made to descend from above the hole 10. Pressure in the pipe 12 is changed as the gap between the die 18 and the hole 10 becomes narrow. A pressure sensor 14 detects the change of the pressure at any time and detects the time of collet touch on the basis of the change of the pressure. |
