| 摘要 |
PROBLEM TO BE SOLVED: To increase the capacitance if the area in plan view of the capacitive element is the same and make the capacitive element smaller if the capacitance is the same by forming the lower electrode having a shape of a concave polygon in plan view. SOLUTION: The element has a pedestal stack type lower electrode of a height H on the whole, whose plan view shape is concave polygonal. That is an isosceles triangle of bottom length W and height X is equivalently moved from one side of a rectangle of length L and width W to other side. Compared with the lower electrode having a convex polygonal contour in plane view, the opposed area of the lower and upper electrodes is wide if the lower electrode plan view area is equal. If the plane view area of the capacitive element is equal, the capacitance can be increased and if the capacitance is equal, the element can be made fine. |
