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发明名称
CLEANING BATH
摘要
申请公布号
JPH1022253(A)
申请公布日期
1998.01.23
申请号
JP19960189954
申请日期
1996.07.02
申请人
KAIJO CORP
发明人
IWATA SHINICHI;YAMAMOTO TOSHIAKI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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