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发明名称
Verfahren und Vorrichtung zur Führung eines Prozesses
摘要
申请公布号
DE59404777(D1)
申请公布日期
1998.01.22
申请号
DE19945004777
申请日期
1994.01.17
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
NIEMANN, MARTIN, DIPL.-ING., D-91054 ERLANGEN, DE
分类号
C23C2/14;C23C2/20;G05B13/02;G05B13/04;G05D5/03;(IPC1-7):G05B13/04;C23C2/06;C23C2/16
主分类号
C23C2/14
代理机构
代理人
主权项
地址
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