| 发明名称 |
Basic stripping and cleaning composition |
| 摘要 |
An aqueous and basic stripping and cleaning composition is provided which contains a hydroxylamine, ammonium fluoride, water and optionally DMSO. The pH of the composition is greater than about 8. Also provided is a method of stripping and cleaning utilizing the compositions of the invention.
|
| 申请公布号 |
US5709756(A) |
申请公布日期 |
1998.01.20 |
| 申请号 |
US19960744013 |
申请日期 |
1996.11.05 |
| 申请人 |
ASHLAND INC. |
发明人 |
WARD, IRL E.;MICHELOTTI, FRANCIS W.;PETERS, DARRYL W. |
| 分类号 |
C11D7/10;C11D7/32;C11D7/34;C11D7/50;C11D11/00;G03F7/16;G03F7/42;H01L21/306;(IPC1-7):H01L21/302;B08B3/08 |
主分类号 |
C11D7/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
