CLEAN AIR SUPPLIER INTO ASEPTIC CHAMBER

摘要

PROBLEM TO BE SOLVED: To easily sterilize a filter of a filter unit. SOLUTION: A clean air supplier comprises a filter unit 17 for filtering air for cleaning and a blower 18 for feeding air to the filter unit 17. A tank 22 is provided between the filter unit 17 and an aseptic chamber 1. The tank 22 includes a hydrogen peroxide spray nozzle 21 provided to be exhibited inward the tank 22 and a heater 19 provided inside the tank 22 for heating clean air obtained by the filter unit 17. A filter unit sterilizing tank 25 is provided between the blower 18 and the filter unit 17. The tank 25 includes a hydrogen peroxide spray nozzle 24 provided to be exhibited inward the tank 25 and a heater 23 provided inside the tank 25 for heating air before being fed to the filter unit 17.