| 摘要 |
PROBLEM TO BE SOLVED: To easily recover substrates by identifying all the substrates, transporting them to corresponding feed side housings, and restarting the treatment of the substrates returned to these housings. SOLUTION: When a wafer transportation error occurs, all units on a production line stop. A machine controller indicates information of wafers on the production line and informs the operator thereof. When any water incapable of automatic recovery exists on the line, the operator manually returns it and instructs the machine controller to recover it. The controller instructed thereby transports all wafers capable of automatically recovery to a wafer carrier at the load side. Information about the wafer carrier at the load of the wafer and slots in the carrier are determined by data stored in the controller. Among the returned wafers, those treated wafers are transferred to the wafer carrier at the unloaded side and untreated wafers are treated again. |
