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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH1012745(A)
申请公布日期
1998.01.16
申请号
JP19960164221
申请日期
1996.06.25
申请人
NEC CORP
发明人
AKIYAMA NAOTO
分类号
H01L21/28;H01L21/3205;H01L21/8238;H01L23/52;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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