发明名称 ULTRAVIOLET-CURING POLYSILOXANE COMPOSITION AND PRODUCTION OF CURED SUBSTANCE PATTERN USING SAME
摘要 PROBLEM TO BE SOLVED: To prevent the blocking of curing by air or oxygen, to attain efficient curing by slight irradiation with UV and to obtain a cured substance pattern having superior heat resistance by heat treatment after pattern formation by using a specified material generating a free radical under the action of UV. SOLUTION: This UV-curing compsn. consists of a free radical generating material generating a free radical under the action of UV and polymer molecules each having a functional group polymerized by the action of the free radical. The free radical generating material is at least one kind of benzoin ether and is contained by 0.001-10wt.% of the total amt. of this compsn. The polymer molecules are silicone polymer molecules whose skeleton structure is represented by the formula (R3 SiO1/2 )a (R'2 SiO2/2 )b (R"SiO3/2 )c -(SiO4/2 )d (where each of R, R' and R" is H, 1-10C satd. or unsatd. hydrocarbon).
申请公布号 JPH1010741(A) 申请公布日期 1998.01.16
申请号 JP19960167488 申请日期 1996.06.27
申请人 DOW CORNING ASIA KK 发明人 TACHIKAWA MAMORU;BRIAN ROBERT HARKNESS;TAKEUCHI KASUMI
分类号 G03F7/004;C08F2/46;C08K5/07;C08K5/20;C08L83/04;C08L83/07;C09D183/04;G03F7/029;G03F7/075;H01L21/027;H01L21/312;(IPC1-7):G03F7/075 主分类号 G03F7/004
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