| 摘要 |
PROBLEM TO BE SOLVED: To reduce the area by which the finger of a substrate transportation robot contacts the work surface of a substrate. SOLUTION: When a substrate 2 is unloaded from a substrate cassette 1, the substrate 3 is pushed out with an auxiliary arm 33 of an auxiliary robot 32, and the side surfaces of the substrate 3 are held with a finder 31 of a substrate transportation robot 30. When the substrate 3 is housed in the substrate cassette 1, the finger 31 of the substrate transportation robot 30 is moved to a place where it is housed, and then the finger 31 is opened. Since the substrate cassette 1 is placed on a substrate cassette stage 2 while tilted by an angleθagainst horizontal direction, the substrate 3 moves to an original position owing to gravity in natural manner. |
