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经营范围
发明名称
FLOW RATE STABILIZATION DEVICE FOR FLUID
摘要
申请公布号
JPH1011148(A)
申请公布日期
1998.01.16
申请号
JP19960167905
申请日期
1996.06.27
申请人
NEC YAMAGATA LTD
发明人
SATO KATSUAKI
分类号
H01L21/027;G05D7/01;(IPC1-7):G05D7/01
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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