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发明名称
Vorrichtung und Methode für Ionenimplantation und Wärmeübertragung
摘要
申请公布号
DE69030702(T2)
申请公布日期
1998.01.15
申请号
DE19906030702T
申请日期
1990.10.02
申请人
SUPERION LTD., SURBITON, SURREY, GB
发明人
AITKEN, DEREK, SURREY KT6 4DE, GB
分类号
H01J37/317;H01L21/00;H01L21/265;H01L21/68;(IPC1-7):H01L21/00;C23C14/50
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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