| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time necessary for exposure/transfer and to improve a throughput, as for an aligner. SOLUTION: The aligner 1 is provided with an illuminating optical system 3 for forming a luminous flux L1 emitted from a light source 2 to a prescribed shape and illuminating an original plate 4 on which a circuit pattern is formed, and a projection optical system 8 for projecting a luminous flux L2 transmitted through the original plate 4 to a photosensitive substrate 7. In this case, the original plate 4 is held by a rotary stage 5 capable of correcting the relative rotational deviation between the original plate 4 and the photosensitive substrate 7, besides, the illuminating optical system 3 includes rotating means 35 and 36 for rotating the luminous flux with the prescribed shape for illuminating the original plate 4 so as to correct the rotational deviation with reference to the exposure area on the original plate 4. Thus, the structure of a stage for placing the photosensitive substrate 7 is simplified and made light in weight, and also the positional deviation at aligning is easily corrected. |
