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发明名称
Verfahren zum Polieren eines Substrats
摘要
申请公布号
DE69407088(D1)
申请公布日期
1998.01.15
申请号
DE19946007088
申请日期
1994.04.28
申请人
MOTOROLA, INC., SCHAUMBURG, ILL., US
发明人
WINEBARGER, PAUL, AUSTIN, TEXAS 78704, US
分类号
B24B37/04;B24B53/007;H01L21/304;H01L21/3105;H01L21/321;(IPC1-7):B24B37/04;H01L21/310
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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