发明名称 Electromagnetic radiation source
摘要 The radiation source includes a heated cathode as an electron source, and a ferro-magnetic intermediate electrode for producing a magnetic field to focus electrons emitted by the heated cathode. The electrons serve for the production of photons due to plasma gas discharge. The intermediate electrode (4) is formed in such way, that an additional electrostatic field is set up in the area of the intermediate electrode during operation of the radiation source (1). An electrically isolating protective layer (5) is preferably provided, which consists of ceramic material.
申请公布号 DE19627004(A1) 申请公布日期 1998.01.08
申请号 DE19961027004 申请日期 1996.07.05
申请人 VSI VACUUM SCIENCE INSTRUMENTS GMBH, 65307 BAD SCHWALBACH, DE 发明人
分类号 F03H1/00;H01J3/04;(IPC1-7):H01J3/04;H01J19/10;H01J27/10;H05H1/24 主分类号 F03H1/00
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