SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus enabling the reduction of particles with keeping the uniformity of the substrate processing. SOLUTION: Below a cup 3 a stage 8 is disposed with a mist separator 9 inserted between the stage 8 and exhaust hole 5 of the cup 3. A pipe 11 piercing the stage 8 is fitted to the separator 9 which is removably mounted on the stage 8 so as to be easily removed from the stage 8 by removing the cup 3. Pipes 17, 15, 14, 13, 11 connected between an exhaust hole 18 of the apparatus body and mist separator have inner diameters decreasing towards the cup 3.