| 发明名称 |
Flow-through ion beam source |
| 摘要 |
A method and an apparatus for forming a charge neutral ion beam which is useful in producing thin films of material on electrically conductive or non-conductive substrates are provided. |
| 申请公布号 |
AU3375497(A) |
申请公布日期 |
1998.01.05 |
| 申请号 |
AU19970033754 |
申请日期 |
1997.05.29 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, |
发明人 |
ROBERT W. SPRINGER |
| 分类号 |
C23C14/22;H01J27/02 |
主分类号 |
C23C14/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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