| 摘要 |
<p>Microfabricated filters (100) constructed with permeable polysilicon membranes (104) and methods for fabricating such filters. The filters include a frame structure (102) having a plurality of openings (103) therethrough and a permeable polysilicon membrane disposed over the openings in the frame structure. The frame structure provides support for the permeable polysilicon membrane. The filter has pores that may be smaller than the resolution limit of photolithography. Also, microfabricated shells constructed with permeable membranes for encapsulating microfabricated devices such as microelectromechanical structures (MEMS) are disclosed. The shells include a frame structure having a plurality of openings therethrough, a permeable membrane disposed on the openings through the frame structure, an optional sealing structure disposed on the permeable membrane, and a cavity bounded to the frame structure.</p> |
