发明名称 |
Support post architecture for micromechanical devices |
摘要 |
A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.
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申请公布号 |
US5703728(A) |
申请公布日期 |
1997.12.30 |
申请号 |
US19940333195 |
申请日期 |
1994.11.02 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
SMITH, GREGORY C.;BOYSEL, ROBERT M. |
分类号 |
B81B3/00;B81C1/00;G02B26/08;G06K15/12;H04N5/74;H04N9/31;(IPC1-7):G02B7/182;G02B5/08;G02B26/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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